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Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application

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Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application

01 Ocak 2007 Makale Google Scholar

Atıf kopyala

P. P. DEMİR (2007). Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application. *Ultrafast X-Ray Sources and Detectors 6703, 71-79, 2007*.

Yayın bilgileri

Dergi Ultrafast X-Ray Sources and Detectors 6703, 71-79, 2007
Veri tabanı Google Scholar
Kaynak GoogleScholar

Atıf verisi 13 Kasım 2026 tarihinde güncellendi.

P Demir, E Kacar, E Akman, SK Bilikmen, A Demir | Ultrafast X-Ray Sources and Detectors 6703, 71-79, 2007

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