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Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application [6703-09]

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Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application [6703-09]

01 Ocak 2007 Makale Google Scholar
Authors
PROFESÖR PINAR DEMİR

Atıf kopyala

P. P. DEMİR (2007). Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application [6703-09]. *PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING 6703, 6703, 2007*.

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Dergi PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING 6703, 6703, 2007
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Atıf verisi 13 Kasım 2026 tarihinde güncellendi.

P Demir, E Kacar, E Akman, SK Bilikmen, A Demir | PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING 6703, 6703, 2007

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